LATTICE CONSTANT

Introduction

Ultra-high resolution diffraction analysis of single-crystalline substrate wafers can be enable by utilizing triple-axis X-ray geometry combined with a highly accurate goniometer.  Triple axis refers to three independent crystalline diffraction components. The sample forms one axis with the other two axes associated with incident and diffracted beam channel cut multi-bounce monochromator crystals. In combination with an XY mapping stage, the variability of the crystalline lattice parameter can be evaluated across a single-crystal wafer. 

Lattice Constant Evaluation with Ultra-High Resolution Optics

 

RELATED APPLICATIONS

B-XRD2024-High_speed_RSM_of_a_III-nitride_epitaxial_film_by_1D_detection_mode_700x1000

High speed RSM of a III-nitride epitaxial film by 1D detection mode

EXPLORE
B-XRD2026-Analysis_of_epitaxial_films_on_in-plane_anisotropic_substrates_by_wide-range_RSM_700x1000

Analysis of epitaxial films on in-plane anisotropic substrates by wide-range RSM

EXPLORE

RIGAKU RECOMMENDS

SmartLab

800x610 SmartLab_picture 01_Ver1_2018.11.12

AUTOMATED MULTIPURPOSE X-RAY DIFFRACTOMETER (XRD) WITH GUIDANCE SOFTWARE

SEE MORE INFO