CURVATURE

Introduction

Any difference in the thermal expansion between epitaxial films and the associated single-crystal substrate can lead to sample warping. The extent of the induced curvature can be evaluated from X-ray rocking curve mapping data collected using an XY translation stage. Knowledge of the extent of curvature can be used as an indicator of residual stress within the film.

Curvature Evaluation with XY Mapping Stage

 

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